Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11242601 | Showerhead and substrate processing apparatus including the same | Sung Tae Je, Chan-Yong Park, Jae Ho Lee, Chang Hoon Yun, Han June Lim +1 more | 2022-02-08 |
| 10145012 | Substrate processing apparatus and substrate processing method | Sung Tae Je, Chang Hoon Yun, Kyong-Hun Kim | 2018-12-04 |
| 10006121 | Method and apparatus for manufacturing three-dimensional-structure memory device | Sung Kil CHO, Hai Won Kim, Sang Ho Woo, Seung Woo Shin, Wan Suk Oh | 2018-06-26 |
| 9425057 | Method and apparatus for manufacturing three-dimensional-structure memory device | Sung Kil CHO, Hai Won Kim, Sang Ho Woo, Seung Woo Shin, Wan Suk Oh | 2016-08-23 |
| 9396954 | Method and apparatus for manufacturing three-dimensional-structure memory device | Sung Kil CHO, Hai Won Kim, Sang Ho Woo, Seung Woo Shin, Wan Suk Oh | 2016-07-19 |
| 8937012 | Production method for semiconductor device | Hai Won Kim, Sang Ho Woo, Sung Kil CHO | 2015-01-20 |