Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11242601 | Showerhead and substrate processing apparatus including the same | Sung Tae Je, Chan-Yong Park, Jae Ho Lee, Gil Sun Jang, Han June Lim +1 more | 2022-02-08 |
| 10145012 | Substrate processing apparatus and substrate processing method | Sung Tae Je, Gil Sun Jang, Kyong-Hun Kim | 2018-12-04 |