Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622228 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Sung Tae Je, Il-Kwang Yang | 2020-04-14 |
| 10192760 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Sung Tae Je, Il-Kwang Yang | 2019-01-29 |