Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488845 | Substrate processing apparatus | Cha-young Yoo, Sung Tae Je, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim +3 more | 2022-11-01 |
| 10840118 | Substrate processing apparatus and method for assembling tube assembly | Cha-young Yoo, Sung Tae Je, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim +3 more | 2020-11-17 |
| 10364494 | Substrate processing apparatus | Cha-young Yoo, Sung Tae Je, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim +3 more | 2019-07-30 |