Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764298 | Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates | Oleg Byl, Edward E. Jones, Chiranjeevi Pydi | 2017-09-19 |
| 9754786 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Anthony M. Avila, Richard S. Ray | 2017-09-05 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2017-06-20 |
| 9666435 | Apparatus and process for integrated gas blending | Jeffrey J. Homan, Jose I. Arno | 2017-05-30 |
| 9631778 | Endpoint determination for capillary-assisted flow control | Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum | 2017-04-25 |
| 9205392 | Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates | Oleg Byl, Edward E. Jones, Chiranjeevi Pydi | 2015-12-08 |
| 9171725 | Enriched silicon precursor compositions and apparatus and processes for utilizing same | James J. Mayer, Richard S. Ray, Robert Kaim | 2015-10-27 |
| 9142387 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2015-09-22 |
| 9132412 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Luping Wang, Shaun M. Wilson, Jose I. Arno +5 more | 2015-09-15 |
| 9111860 | Ion implantation system and method | Edward E. Jones, Sharad N. Yedave, Ying Tang, Barry Lewis Chambers, Robert Kaim +2 more | 2015-08-18 |
| 9109755 | Endpoint determination for capillary-assisted flow control | Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum | 2015-08-18 |
| 9012874 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Anthony M. Avila, Richard S. Ray | 2015-04-21 |
| 8796131 | Ion implantation system and method | Edward E. Jones, Sharad N. Yedave, Ying Tang, Barry Lewis Chambers, Robert Kaim +2 more | 2014-08-05 |
| 8785889 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Anthony M. Avila, Richard S. Ray | 2014-07-22 |
| 8779383 | Enriched silicon precursor compositions and apparatus and processes for utilizing same | James J. Mayer, Richard S. Ray, Robert Kaim | 2014-07-15 |
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +7 more | 2013-12-10 |
| 8598022 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2013-12-03 |
| 8539781 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Luping Wang, Shaun M. Wilson, Jose I. Arno +5 more | 2013-09-24 |
| 8399865 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Anthony M. Avila, Richard S. Ray | 2013-03-19 |
| 8237134 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Anthony M. Avila, Richard S. Ray | 2012-08-07 |
| 8138071 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2012-03-20 |
| 8062965 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2011-11-22 |
| 7857880 | Semiconductor manufacturing facility utilizing exhaust recirculation | W. Karl Olander, Luping Wang | 2010-12-28 |
| 7485169 | Semiconductor manufacturing facility utilizing exhaust recirculation | W. Karl Olander, Luping Wang | 2009-02-03 |
| 7364603 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Paul J. Marganski, W. Karl Olander | 2008-04-29 |