Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105037 | Semiconductor manufacturing facility utilizing exhaust recirculation | W. Karl Olander, Luping Wang | 2006-09-12 |
| 6805728 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Paul J. Marganski, W. Karl Olander, Luping Wang | 2004-10-19 |
| 6759018 | Method for point-of-use treatment of effluent gas streams | Jose I. Arno, Mark Holst, Sam Yee, Jeff Lorelli, Jason Deseve | 2004-07-06 |
| 5935283 | Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system | Prakash V. Arya, Mark Holst, Scott Lane | 1999-08-10 |