Issued Patents All Time
Showing 51–75 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7682225 | Polishing apparatus and substrate processing apparatus | Akihisa Hongo, Kenji Yamaguchi, Masayuki Nakanishi | 2010-03-23 |
| 7662985 | Production process for a silicon compound | Mikio Yamahiro, Hisao Oikawa, Yasuhiro Yamamoto, Masami Tanaka, Nobumasa Ootake +4 more | 2010-02-16 |
| 7578886 | Substrate processing apparatus, substrate processing method, and substrate holding apparatus | Kaoru Yamada, Takayuki Saito, Sumio Yabe, Masayuki Kamezawa, Masaya Seki +2 more | 2009-08-25 |
| 7563917 | Silicon compound and a production process for silicon compound | Mikio Yamahiro, Hisao Oikawa, Masami Tanaka, Nobumasa Ootake, Kenichi Watanabe | 2009-07-21 |
| 7507450 | Varnish for forming liquid crystal alignment layer and liquid crystal display element using the same | Takayuki Hattori, Keizo Iwatani, Nobuyuki Ootsuka, Takashi Katoh, Nobumasa Ootake +1 more | 2009-03-24 |
| 7476290 | Substrate processing apparatus and substrate processing method | Takayuki Saito, Tsukuru Suzuki, Kaoru Yamada, Masayuki Kamezawa, Kenji Yamaguchi | 2009-01-13 |
| 7399819 | Silicon compound | Mikio Yamahiro, Hisao Oikawa, Kazuhiro Yoshida, Yasuhiro Yamamoto, Masami Tanaka +5 more | 2008-07-15 |
| 7373060 | Optical waveguide using polymer composed of silsesquioxane derivative | Hideshi Satake, Nobuyuki Ootsuka, Yasuhiro Yamamoto, Nobumasa Ootake, Kazuhiro Yoshida | 2008-05-13 |
| 7235619 | Silsesquioxane derivative | Yoshitaka Morimoto, Hisaoi Oikawa, Mikio Yamahiro, Kenichi Watanabe, Nobumasa Ootake | 2007-06-26 |
| 7129370 | Silicon compound and a production process for silicon compound | Mikio Yamahiro, Hisao Oikawa, Masami Tanaka, Nobumasa Ootake, Kenichi Watanabe | 2006-10-31 |
| 7055535 | Holding unit, processing apparatus and holding method of substrates | Junji Kunisawa, Norio Kimura, Akira Fukunaga, Yuuki Inoue, Hiroshi Tomita +2 more | 2006-06-06 |
| 7053167 | Silsesquioxane derivative having functional group | Mikio Yamahiro, Kenichi Watanabe | 2006-05-30 |
| 6932884 | Substrate processing apparatus | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Mitsuhiko Shirakashi | 2005-08-23 |
| 6716516 | Magnetic recording medium and magnetic recording apparatus using the same | Masaaki Futamoto, Nobuyuki Inaba, Yoshiyuki Hirayama, Yukio Honda, Kazuetsu Yoshida | 2004-04-06 |
| 6683738 | Storage device for reliably maintaining data in a reproducible state for a long period of time | — | 2004-01-27 |
| 6679950 | Cleaning method and cleaner | Hiroshi Tomita, Motoyuki Sato, Soichi Nadahara, Mitsuhiko Shirakashi | 2004-01-20 |
| 6607849 | Magnetic recording medium and magnetic recording apparatus using the same | Masaaki Futamoto, Nobuyuki Inaba, Yoshiyuki Hirayama, Yukio Honda, Kazuetsu Yoshida | 2003-08-19 |
| 6592976 | Magnetic recording medium and magnetic recording apparatus using the same | Masaaki Futamoto, Nobuyuki Inaba, Yoshiyuki Hirayama, Yukio Honda, Kazuetsu Yoshida | 2003-07-15 |
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kunihiko Sakurai, Satoshi Wakabayashi, Tetsuji Togawa | 2003-06-17 |
| 6549350 | Storage device for reliably maintaining data in a reproducible state for a long period of time | — | 2003-04-15 |
| 6543080 | Apparatus and method for cleaning semiconductor substrate | Hiroshi Tomita, Soichi Nadahara, Mitsuhiko Shirakashi, Yuki Inoue | 2003-04-08 |
| 6534164 | Magnetic recording medium and magnetic recording apparatus using the same | Masaaki Futamoto, Nobuyuki Inaba, Yoshiyuki Hirayama, Yukio Honda, Kazuetsu Yoshida | 2003-03-18 |
| 6494220 | Apparatus for cleaning a substrate such as a semiconductor wafer | Naoki Matsuda, Mitsuhiko Shirakashi | 2002-12-17 |
| 6447936 | Magnetic recording medium and magnetic recording apparatus using the same | Masaaki Futamoto, Nobuyuki Inaba, Yoshiyuki Hirayama, Yukio Honda, Kazuetsu Yoshida | 2002-09-10 |
| 6437931 | Storage device for reliably maintaining data in a reproducible state for a long period of time | — | 2002-08-20 |