Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5581590 | SOR exposure system and method of manufacturing semiconductor devices using same | Makiko Mori, Kunitaka Ozawa | 1996-12-03 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1996-06-04 |
| 5444758 | Beam position detecting device | Akira Miyake | 1995-08-22 |
| 5440394 | Length-measuring device and exposure apparatus | Noriyuki Nose, Kenji Saito | 1995-08-08 |
| 5400386 | Angle detecting device and optical apparatus, such as exposure apparatus, employing the same | Akira Miyake | 1995-03-21 |
| 5329126 | Apparatus and process for vacuum-holding an object | Shunichi Uzawa | 1994-07-12 |
| 5323440 | X-ray lithography apparatus including a dose detectable mask | Shinichi Hara, Shunichi Uzawa | 1994-06-21 |
| 5267292 | X-ray exposure apparatus | Yutaka Tanaka, Nobutoshi Mizusawa, Takao Kariya, Isamu Shimoda | 1993-11-30 |
| 5231291 | Wafer table and exposure apparatus with the same | Eiji Sakamoto, Koji Uda, Kunitaka Ozawa, Kazunori Iwamoto, Shunichi Uzawa +1 more | 1993-07-27 |
| 5172403 | X-ray exposure apparatus | Yutaka Tanaka, Nobutoshi Mizusawa, Takao Kariya, Shunichi Uzawa | 1992-12-15 |
| 5159621 | X-ray transmitting window and method of mounting the same | Yutaka Watanabe, Shunichi Uzawa, Yasuaki Fukuda, Nobutoshi Mizusawa, Ryuichi Ebinuma | 1992-10-27 |
| 5157700 | Exposure apparatus for controlling intensity of exposure radiation | Hiroshi Kurosawa, Shigeru Terashima, Koji Uda, Isamu Shimoda, Shunichi Uzawa +6 more | 1992-10-20 |
| 5138643 | Exposure apparatus | Eiji Sakamoto, Ryuichi Ebinuma, Shunichi Uzawa, Koji Uda | 1992-08-11 |
| 5131022 | Exposure method and apparatus | Shigeru Terashima, Isamu Shimoda, Shunichi Uzawa, Takao Kariya | 1992-07-14 |
| 5093579 | Exposure apparatus with a substrate holding mechanism | Shinichi Hara, Eiji Sakamoto | 1992-03-03 |
| 4935947 | X-ray exposure apparatus | — | 1990-06-19 |
| 4906326 | Mask repair system | Shunichi Uzawa | 1990-03-06 |
| 4604345 | Exposure method | — | 1986-08-05 |