Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241409 | Materials containing metal oxides, processes for making same, and processes for using same | Huirong Yao, M. Dalil Rahman, JoonYeon Cho | 2019-03-26 |
| 9296922 | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use | Huirong Yao, Salem K. Mullen, Elizabeth WOLFER, JoonYeon Cho, Munirathna Padmanaban | 2016-03-29 |
| 9274426 | Antireflective coating compositions and processes thereof | M. Dalil Rahman, Takanori Kudo, Alberto D. Dioses, Clement Anyadiegwu, Munirathna Padmanaban +1 more | 2016-03-01 |
| 9201305 | Spin-on compositions of soluble metal oxide carboxylates and methods of their use | M. Dalil Rahman, Venkata Gopal Reddy Chada, Huirong Yao, Clement Anyadiegwu | 2015-12-01 |
| 9152051 | Antireflective coating composition and process thereof | M. Dalil Rahman, Clement Anyadiegwu, Takanori Kudo, Elizabeth WOLFER, Salem K. Mullen | 2015-10-06 |
| 8906590 | Antireflective coating composition and process thereof | Dalil M Rahman, Jianhui Shan, JoonYeon Cho, Salem K. Mullen, Clement Anyadiegwu | 2014-12-09 |
| 8906592 | Antireflective coating composition and process thereof | M. Dalil Rahman, Clement Anyadiegwu, JoonYeon Cho | 2014-12-09 |
| 8486609 | Antireflective coating composition and process thereof | M. Dalil Rahman, Huirong Yao, JoonYeon Cho, Yi Yl, Guanyang Lin | 2013-07-16 |
| 8017296 | Antireflective coating composition comprising fused aromatic rings | Francis Houlihan, David Abdallah, M. Dalil Rahman, Ruzhi Zhang, Allen G. Timko +2 more | 2011-09-13 |
| 7989144 | Antireflective coating composition | M. Dalil Rahman, David Abdallah, Rhuzi Zhang | 2011-08-02 |
| 7932018 | Antireflective coating composition | David Abdallah, Allen G. Timko, M. Dalil Rahman | 2011-04-26 |
| 6911293 | Photoresist compositions comprising acetals and ketals as solvents | Stanley F. Wanat, Joseph E. Oberlander, Robert Plass | 2005-06-28 |
| 6610465 | Process for producing film forming resins for photoresist compositions | M. Dalil Rahman, Takanori Kudo, Munirathna Padmanaban | 2003-08-26 |
| 6103443 | Photoresist composition containing a novel polymer | Stanley F. Wanat, Kathryn Jensen, Ping-Hung Lu | 2000-08-15 |
| 5928836 | Fractionated novolak resin copolymer and photoresist composition therefrom | M. Dalil Rahman, Stanley F. Wanat, Michelle Cook, Sunit S. Dixit | 1999-07-27 |
| 5858627 | Image formation utilizing photosensitive compositions containing low metal content p-cresol oligomers | M. Dalil Rahman, Dinesh N. Khanna, Daniel P. Aubin | 1999-01-12 |
| 5837417 | Quinone diazide compositions containing low metals p-cresol oligomers and process of producing the composition | M. Dalil Rahman, Dinesh N. Khanna, Daniel P. Aubin | 1998-11-17 |
| 5521052 | Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom | M. Dalil Rahman, Daniel P. Aubin, Dinesh N. Khanna | 1996-05-28 |
| 5348842 | Method for producing positive photoresist image utilizing diazo ester of benzolactone ring compound and diazo sulfonyl chloride | Dinesh N. Khanna, Chester J. Sobodacha, Ralph R. Dammel | 1994-09-20 |
| 5221592 | Diazo ester of a benzolactone ring compound and positive photoresist composition and element utilizing the diazo ester | Dinesh N. Khanna, Chester J. Sobodacha, Ralph R. Dammel | 1993-06-22 |