Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099305 | Rinse and method of use thereof for removing edge protection layers and residual metal hardmask components | M. Dalil Rahman, Salem K. Mullen | 2024-09-24 |
| 11421128 | Composition of spin-on materials containing metal oxide nanoparticles and an organic polymer | M. Dalil Rahman, Huirong Yao, Munirathna Padmanaban, Elizabeth WOLFER | 2022-08-23 |
| 11042091 | Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability | Huirong Yao, M. Dalil Rahman | 2021-06-22 |
| 10241409 | Materials containing metal oxides, processes for making same, and processes for using same | Huirong Yao, M. Dalil Rahman, Douglas McKenzie | 2019-03-26 |
| 9499698 | Metal hardmask composition and processes for forming fine patterns on semiconductor substrates | Huirong Yao, Elizabeth WOLFER, Salem K. Mullen, Alberto D. Dioses | 2016-11-22 |
| 9418836 | Polyoxometalate and heteropolyoxometalate compositions and methods for their use | Venkata Gopal Reddy Chada, Huirong Yao, Munirathna Padmanaban, Elizabeth WOLFER, Alberto D. Dioses +1 more | 2016-08-16 |
| 9409793 | Spin coatable metallic hard mask compositions and processes thereof | Venkata Gopal Reddy Chada, Huirong Yao, Salem K. Mullen, Elizabeth WOLFER, Alberto D. Dioses +1 more | 2016-08-09 |
| 9315636 | Stable metal compounds, their compositions and methods | Huirong Yao, M. Dalil Rahman, Salem K. Mullen, Clement Anyadiegwu, Munirathna Padmanaban | 2016-04-19 |
| 9296922 | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use | Huirong Yao, Salem K. Mullen, Elizabeth WOLFER, Douglas McKenzie, Munirathna Padmanaban | 2016-03-29 |
| 9170494 | Antireflective compositions and methods of using same | Huirong Yao, Guanyang Lin | 2015-10-27 |
| 8906590 | Antireflective coating composition and process thereof | Dalil M Rahman, Douglas McKenzie, Jianhui Shan, Salem K. Mullen, Clement Anyadiegwu | 2014-12-09 |
| 8906592 | Antireflective coating composition and process thereof | M. Dalil Rahman, Clement Anyadiegwu, Douglas McKenzie | 2014-12-09 |
| 8507192 | Antireflective compositions and methods of using same | Huirong Yao, Guanyang Lin, Jianhui Shan, Salem K. Mullen | 2013-08-13 |
| 8486609 | Antireflective coating composition and process thereof | M. Dalil Rahman, Douglas McKenzie, Huirong Yao, Yi Yl, Guanyang Lin | 2013-07-16 |