Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421128 | Composition of spin-on materials containing metal oxide nanoparticles and an organic polymer | M. Dalil Rahman, JoonYeon Cho, Munirathna Padmanaban, Elizabeth WOLFER | 2022-08-23 |
| 11042091 | Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability | JoonYeon Cho, M. Dalil Rahman | 2021-06-22 |
| 10241409 | Materials containing metal oxides, processes for making same, and processes for using same | M. Dalil Rahman, Douglas McKenzie, JoonYeon Cho | 2019-03-26 |
| 9499698 | Metal hardmask composition and processes for forming fine patterns on semiconductor substrates | Elizabeth WOLFER, Salem K. Mullen, Alberto D. Dioses, JoonYeon Cho | 2016-11-22 |
| 9418836 | Polyoxometalate and heteropolyoxometalate compositions and methods for their use | Venkata Gopal Reddy Chada, Munirathna Padmanaban, JoonYeon Cho, Elizabeth WOLFER, Alberto D. Dioses +1 more | 2016-08-16 |
| 9409793 | Spin coatable metallic hard mask compositions and processes thereof | Venkata Gopal Reddy Chada, Salem K. Mullen, Elizabeth WOLFER, Alberto D. Dioses, JoonYeon Cho +1 more | 2016-08-09 |
| 9315636 | Stable metal compounds, their compositions and methods | M. Dalil Rahman, Salem K. Mullen, JoonYeon Cho, Clement Anyadiegwu, Munirathna Padmanaban | 2016-04-19 |
| 9296922 | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use | Salem K. Mullen, Elizabeth WOLFER, Douglas McKenzie, JoonYeon Cho, Munirathna Padmanaban | 2016-03-29 |
| 9201305 | Spin-on compositions of soluble metal oxide carboxylates and methods of their use | M. Dalil Rahman, Venkata Gopal Reddy Chada, Clement Anyadiegwu, Douglas McKenzie | 2015-12-01 |
| 9170494 | Antireflective compositions and methods of using same | Guanyang Lin, JoonYeon Cho | 2015-10-27 |
| 8568958 | Underlayer composition and process thereof | Guanyang Lin, Zachary BOGUSZ, PingHung Lu, WooKyu Kim, Mark Neisser | 2013-10-29 |
| 8551686 | Antireflective composition for photoresists | Guanyang Lin, Mark Neisser | 2013-10-08 |
| 8507192 | Antireflective compositions and methods of using same | Guanyang Lin, Jianhui Shan, JoonYeon Cho, Salem K. Mullen | 2013-08-13 |
| 8486609 | Antireflective coating composition and process thereof | M. Dalil Rahman, Douglas McKenzie, JoonYeon Cho, Yi Yl, Guanyang Lin | 2013-07-16 |
| 8465902 | Underlayer coating composition and processes thereof | Zachary BOGUSZ, Guanyang Lin, Mark Neisser | 2013-06-18 |
| 8445181 | Antireflective coating composition and process thereof | Jain Yin, Guanyang Lin, Mark Neisser, David Abdallah | 2013-05-21 |
| 8329387 | Antireflective coating compositions | Guanyang Lin, Jian Yin, Hengpeng Wu, Mark Neisser, Ralph R. Dammel | 2012-12-11 |
| 8221965 | Antireflective coating compositions | Zhong Xiang, Jianhui Shan, Salem K. Mullen, Hengpeng Wu | 2012-07-17 |
| 8039201 | Antireflective coating composition and process thereof | Zhong Xiang, Jian Yin, Weihong Liu | 2011-10-18 |
| 7638262 | Antireflective composition for photoresists | Hengpeng Wu, Zhong Xiang, Hong Zhuang, Jianhui Shan, Jian Yin +1 more | 2009-12-29 |
| 7470500 | Organic bottom antireflective polymer compositions | Shuji Ding-Lee | 2008-12-30 |
| 7030201 | Bottom antireflective coatings | Shuji Ding-Lee, Hengpeng Wu, Zhong Xiang | 2006-04-18 |