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Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle |
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Pellicle and pellicle assembly |
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Pellicle and pellicle assembly |
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Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
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Membrane for EUV lithography |
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Pellicle and pellicle assembly |
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| 11467486 |
Graphene pellicle lithographic apparatus |
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2022-10-11 |
| 11347142 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
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| 11320731 |
Membrane for EUV lithography |
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2022-05-03 |
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Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
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Membrane assembly |
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2021-06-15 |
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Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2021-04-20 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
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| 10712656 |
Method for manufacturing a membrane assembly |
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Pellicle and pellicle assembly |
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2019-11-05 |