| 8363208 |
Lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman, Marcel Mathijs Theodore Marie Dierichs |
2013-01-29 |
| 8344341 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Hubertus Mulkens +2 more |
2013-01-01 |
| 8208120 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more |
2012-06-26 |
| 8169593 |
Lithographic apparatus and device manufacturing method |
Franciscus Godefridus Casper Bijnen |
2012-05-01 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2011-07-19 |
| 7795603 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Catharinus Hubertus Mulkens +2 more |
2010-09-14 |
| 7684008 |
Lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman |
2010-03-23 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2009-09-22 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2009-09-22 |
| 7482611 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Catharinus Hubertus Mulkens +2 more |
2009-01-27 |
| 7477403 |
Optical position assessment apparatus and method |
Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen, Johan Christiaan Gerard Hoefnagels, Pieter Willem Herman De Jager |
2009-01-13 |
| 7459247 |
Lithographic apparatus and device manufacturing method |
Fransiscus Godefridus Casper Bijnen |
2008-12-02 |
| 7388648 |
Lithographic projection apparatus |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2008-06-17 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more |
2008-05-13 |
| 7317504 |
Lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman, Marcel Mathijs Theodore Marie Dierichs |
2008-01-08 |
| 7274029 |
Lithographic apparatus and device manufacturing method |
Joeri Lof |
2007-09-25 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2007-04-03 |
| 7193232 |
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Catharinus Hubertus Mulkens +2 more |
2007-03-20 |
| 7116404 |
Lithographic apparatus and device manufacturing method |
Joeri Lof |
2006-10-03 |
| 7081943 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman |
2006-07-25 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2005-10-04 |