Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7018504 | Loadlock with integrated pre-clean chamber | Ivo Raaijmakers, James Kusbel | 2006-03-28 |
| 6899145 | Front opening unified pod | — | 2005-05-31 |
| 6883250 | Non-contact cool-down station for wafers | Bob Haro | 2005-04-26 |
| 6883776 | Slit valve for a semiconductor processing system | Jim Kusbel, Jerry Davis | 2005-04-26 |
| 6879777 | Localized heating of substrates using optics | Matthew G. Goodman, Tony Keeton, Mark Hawkins | 2005-04-12 |
| 6776849 | Wafer holder with peripheral lift ring | Tony Keeton, Matthew G. Goodman | 2004-08-17 |
| 6704496 | High temperature drop-off of a substrate | Paul Jacobson, Ivo Raaijmakers, Robert C. Haro | 2004-03-09 |
| 6696367 | System for the improved handling of wafers within a process tool | Jim Kusbel, Jim Alexander | 2004-02-24 |
| 6609869 | Transfer chamber with integral loadlock and staging station | James Kusbel | 2003-08-26 |
| 6592318 | Docking cart with integrated load port | — | 2003-07-15 |
| 6550158 | Substrate handling chamber | Allan Doley, Dennis L. Goodwin, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez | 2003-04-22 |
| 6521503 | High temperature drop-off of a substrate | Paul Jacobson, Ivo Raaijmakers, Robert C. Haro | 2003-02-18 |
| 6465761 | Heat lamps for zone heating | Ronald R. Stevens, Eric James Shero, Michael Halpin | 2002-10-15 |
| 6318957 | Method for handling of wafers with minimal contact | Paul R. Carr, Paul Jacobson, James Kusbel, James S. Roundy, Ivo Raaijmakers +2 more | 2001-11-20 |
| 6242718 | Wafer holder | Armand P. Ferro, Ivo Raaijmakers, Ronald R. Stevens | 2001-06-05 |
| 6162006 | Stackable cassette for use with wafer cassettes | Ronald R. Stevens | 2000-12-19 |
| 6158951 | Wafer carrier and method for handling of wafers with minimal contact | Paul R. Carr, Paul Jacobson, James Kusbel, James S. Roundy, Ivo Raaijmakers | 2000-12-12 |
| 6042324 | Multi-stage single-drive FOUP door system | Ronald R. Stevens | 2000-03-28 |
| 5091217 | Method for processing wafers in a multi station common chamber reactor | H. Peter W. Hey, William A. Mazak, John H. Curtin, Paul Brown, Joe R. Smith | 1992-02-25 |
| 4987856 | High throughput multi station processor for multiple single wafers | H. Peter W. Hey, William A. Mazak, John H. Curtin | 1991-01-29 |