Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5091217 | Method for processing wafers in a multi station common chamber reactor | H. Peter W. Hey, Ravinder Aggarwal, John H. Curtin, Paul Brown, Joe R. Smith | 1992-02-25 |
| 4987856 | High throughput multi station processor for multiple single wafers | H. Peter W. Hey, Ravinder Aggarwal, John H. Curtin | 1991-01-29 |