Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7704897 | HDP-CVD SiON films for gap-fill | Hemant P. Mungekar, Agnieszka Jakubowicz, Zhong Qiang Hua, Rionard Purnawan, Sanjay Kamath +1 more | 2010-04-27 |
| 7678715 | Low wet etch rate silicon nitride film | Hemant P. Mungekar, Jing-Lung Wu, Anchuan Wang | 2010-03-16 |
| 7651587 | Two-piece dome with separate RF coils for inductively coupled plasma reactors | Siqing Lu, Qiwei Liang, Canfeng Lai, Robert Chen, Jason Bloking +3 more | 2010-01-26 |
| 7629271 | High stress diamond like carbon film | Jing-Lung Wu, Anchuan Wang, Robert Chen | 2009-12-08 |
| 7524750 | Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD | Srinivas D. Nemani, Ellie Yieh, Anchuan Wang, Jason Bloking, Lung-Tien Han | 2009-04-28 |
| 7329586 | Gapfill using deposition-etch sequence | Manoj Vellaikal, Hemant P. Mungekar, Yasutoshi Okuno, Hiroshi Yuasa | 2008-02-12 |
| 7229931 | Oxygen plasma treatment for enhanced HDP-CVD gapfill | Hemant P. Mungekar, Manoj Vellaikal, Karen Greig, Bikram Kapoor | 2007-06-12 |
| 5424107 | Reinforced corner structure for cloth | — | 1995-06-13 |