Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7659184 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Martin A. Hilkene, Matthew D. Scotney-Castle +2 more | 2010-02-09 |
| 7651384 | Method and system for point of use recycling of ECMP fluids | Josh H. Golden, Donald George Myers | 2010-01-26 |
| 7601264 | Method for treatment of plating solutions | Josh H. Golden, Timothy Weidman, Kalyan Sista, Nikhil Krishnan | 2009-10-13 |
| 7532952 | Methods and apparatus for pressure control in electronic device manufacturing systems | Mark W. Curry, Sebastien Raoux | 2009-05-12 |
| 7160521 | Treatment of effluent from a substrate processing chamber | Sebastien Raoux, Mike Woolston, Christopher L. Aardahl, Rick J. Orth, Kenneth G. Rappe | 2007-01-09 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Canfeng Lai, Michael S. Cox, Padmanabhan Krishnaraj, Tsutomu Tanaka +2 more | 2005-03-08 |
| 6828241 | Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source | Arnold Kholodenko | 2004-12-07 |