Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160521 | Treatment of effluent from a substrate processing chamber | Peter I. Porshnev, Sebastien Raoux, Christopher L. Aardahl, Rick J. Orth, Kenneth G. Rappe | 2007-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160521 | Treatment of effluent from a substrate processing chamber | Peter I. Porshnev, Sebastien Raoux, Christopher L. Aardahl, Rick J. Orth, Kenneth G. Rappe | 2007-01-09 |