Issued Patents All Time
Showing 226–238 of 238 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5349313 | Variable RF power splitter | John Trow, Craig A. Roderick | 1994-09-20 |
| 5315473 | Isolated electrostatic chuck and excitation method | Edward A. Gritters | 1994-05-24 |
| 5312778 | Method for plasma processing using magnetically enhanced plasma chemical vapor deposition | Chan-Lon Yang, John M. White | 1994-05-17 |
| 5300460 | UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers | Craig A. Roderick, Chan-Lon Yang, David N. Wang, Dan Maydan | 1994-04-05 |
| 5210466 | VHF/UHF reactor system | Craig A. Roderick, Chan-Lon Yang, David N. Wang, Dan Maydan | 1993-05-11 |
| 5187454 | Electronically tuned matching network using predictor-corrector control system | John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. | 1993-02-16 |
| 5065118 | Electronically tuned VHF/UHF matching network | Craig A. Roderick | 1991-11-12 |
| 5000113 | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process | David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more | 1991-03-19 |
| 4962441 | Isolated electrostatic wafer blade clamp | — | 1990-10-09 |
| 4960488 | Reactor chamber self-cleaning process | Kam S. Law, Cissy Leung, Ching Chiang Tang, Mei Chang, Jerry Wong +1 more | 1990-10-02 |
| 4951009 | Tuning method and control system for automatic matching network | — | 1990-08-21 |
| 4892753 | Process for PECVD of silicon oxide using TEOS decomposition | David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more | 1990-01-09 |
| 4872947 | CVD of silicon oxide using TEOS decomposition and in-situ planarization process | David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more | 1989-10-10 |