Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495975 | Line edge roughness reduction via step size alteration | Thomas Laidig, Christopher Dennis Bencher | 2019-12-03 |
| 10488762 | Method to reduce data stream for spatial light modulator | Thomas Laidig, Christopher Dennis Bencher | 2019-11-26 |
| 10416550 | Method to reduce line waviness | Christopher Dennis Bencher, Thomas Laidig | 2019-09-17 |
| 10394130 | Quarter wave light splitting | Christopher Dennis Bencher, Dave Markle, Mehdi Vaez-Iravani | 2019-08-27 |
| 10289003 | Line edge roughness reduction via step size alteration | Thomas Laidig, Christopher Dennis Bencher | 2019-05-14 |
| 10234630 | Method for creating a high refractive index wave guide | Rutger Meyer Timmerman Thijssen, Steven Verhaverbeke | 2019-03-19 |
| 10154586 | Apparatus and method for solid state source array design and fabrication | Sriskantharajah Thirunavukarasu | 2018-12-11 |
| 9927696 | Method to reduce line waviness | Christopher Dennis Bencher, Thomas Laidig | 2018-03-27 |
| 9823573 | Correction of non-uniform patterns using time-shifted exposures | Christopher Dennis Bencher, Thomas Laidig | 2017-11-21 |
| 9791786 | Method to reduce line waviness | Christopher Dennis Bencher, Thomas Laidig | 2017-10-17 |
| 9754807 | High density solid state light source array | John E. Gerling, Joseph M. Ranish, Oleg V. Serebryanov | 2017-09-05 |
| 9721802 | LED based optical source coupled with plasma source | Subhash Deshmukh | 2017-08-01 |
| 9576810 | Process for etching metal using a combination of plasma and solid state sources | Subhash Deshmukh, Jingjing Liu, He Ren | 2017-02-21 |
| 9543172 | Apparatus for providing and directing heat energy in a process chamber | Joseph M. Ranish, John E. Gerling, Mathew Abraham, Aaron Muir Hunter, Aneesh Nainani | 2017-01-10 |
| 9513052 | Linear high packing density for LED arrays | Joseph M. Ranish | 2016-12-06 |
| 9406653 | Integrated solution for solid state light sources in a process chamber | Joseph M. Ranish | 2016-08-02 |
| 9318360 | Linear high packing density for LED arrays | Joseph M. Ranish | 2016-04-19 |
| 9232569 | Solid state light source assisted processing | John E. Gerling, Klaus Schuegraf | 2016-01-05 |
| 9140647 | Test apparatus for reflective cavity characterization | Joseph M. Ranish, Mehran Behdjat | 2015-09-22 |
| 9010409 | Thermal switch using moving droplets | Dirk De Bruyker, David Eric Schwartz, Ricardo Santos Roque, Sean Garner, Matthew Eisaman | 2015-04-21 |
| 8896837 | Test apparatus for reflective cavity characterization | Joseph M. Ranish, Mehran Behdjat | 2014-11-25 |