Issued Patents All Time
Showing 76–85 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6024630 | Fluid-pressure regulated wafer polishing head | Norman Shendon, Michael Sherwood | 2000-02-15 |
| 5804507 | Radially oscillating carousel processing system for chemical mechanical polishing | Ilya Perlov, Eugene Gantvarg, Sasson Somekh, Robert D. Tolles | 1998-09-08 |
| 5795215 | Method and apparatus for using a retaining ring to control the edge effect | William L. Guthrie, Tsungnan Cheng, Sen-Hou Ko, Michael Sherwood, Norm Shendon | 1998-08-18 |
| 5738574 | Continuous processing system for chemical mechanical polishing | Robert D. Tolles, Norm Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg | 1998-04-14 |
| 5681215 | Carrier head design for a chemical mechanical polishing apparatus | Michael Sherwood, Norm Shendon, Semyon Spektor | 1997-10-28 |
| 5599423 | Apparatus and method for simulating and optimizing a chemical mechanical polishing system | Norman W. Parker, Robert D. Tolles | 1997-02-04 |
| 5497007 | Method for automatically establishing a wafer coordinate system | Yuri S. Uritsky | 1996-03-05 |
| 5422724 | Multiple-scan method for wafer particle analysis | Patrick Kinney, Yuri S. Uritsky | 1995-06-06 |
| 5381004 | Particle analysis of notched wafers | Yuri S. Uritsky | 1995-01-10 |
| 5267017 | Method of particle analysis on a mirror wafer | Yuri S. Uritsky, Patrick Kinney, Kang-Ho Ahn | 1993-11-30 |