Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6180533 | Method for etching a trench having rounded top corners in a silicon substrate | Alok Jain, Michelle Low, Gang Zou, David Mui, Wei Liu | 2001-01-30 |
| 5926689 | Process for reducing circuit damage during PECVD in single wafer PECVD system | Donna R. Cote, John C. Forster, Virinder Grewal, Anthony Konecni | 1999-07-20 |
| 5801386 | Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same | Valentin Todorov, Yoshi Tanase, Xue-Yu Qian, Arthur H. Sato, Peter Loewenhardt +2 more | 1998-09-01 |
| 5505816 | Etching of silicon dioxide selectively to silicon nitride and polysilicon | Michael Barnes, John H. Keller, William M. Holber, Tina J. Cotler, Jonathan D. Chapple-Sokol | 1996-04-09 |
| 5468955 | Neutral beam apparatus for in-situ production of reactants and kinetic energy transfer | Lee Chen, Akihisa Sekiguchi | 1995-11-21 |
| 5081002 | Method of localized photohemical etching of multilayered semiconductor body | Mark Ruberto, Alan E. Willner, Richard M. Osgood, Jr. | 1992-01-14 |