Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262869 | Planarization method | Jen-Chieh Lin, Wen-Chin Lin, Chi-Lune Huang, Pi-Hung Chuang, Tai-Lin Chen +1 more | 2019-04-16 |
| 5468955 | Neutral beam apparatus for in-situ production of reactants and kinetic energy transfer | Dragan Podlesnik, Akihisa Sekiguchi | 1995-11-21 |
| 5423940 | Supersonic molecular beam etching of surfaces | Shwu-Jen Jeng, Wesley C. Natzle, Chienfan Yu | 1995-06-13 |
| 5286331 | Supersonic molecular beam etching of surfaces | Shwu-Jen Jeng, Wesley C. Natzle, Chienfan Yu | 1994-02-15 |
| 4741799 | Anisotropic silicon etching in fluorinated plasma | Gangadhara S. Mathad | 1988-05-03 |
| 4671849 | Method for control of etch profile | Gangadhara S. Mathad | 1987-06-09 |
| 4602981 | Monitoring technique for plasma etching | Gangadhara S. Mathad | 1986-07-29 |
| 4534816 | Single wafer plasma etch reactor | Charles J. Hendricks, Gangadhara S. Mathad, Stanley J. Poloncic | 1985-08-13 |
| 4511430 | Control of etch rate ratio of SiO.sub.2 /photoresist for quartz planarization etch back process | Gangadhara S. Mathad | 1985-04-16 |
| 4493745 | Optical emission spectroscopy end point detection in plasma etching | Henri A. Khoury, Harlan Seymour | 1985-01-15 |
| 4490210 | Laser induced dry chemical etching of metals | Tung J. Chuang, Gangadhara S. Mathad | 1984-12-25 |
| 4490211 | Laser induced chemical etching of metals with excimer lasers | John R. Lankard, Sr., Gangadhara S. Mathad | 1984-12-25 |
| 4478677 | Laser induced dry etching of vias in glass with non-contact masking | Tung J. Chuang, Gangadhara S. Mathad | 1984-10-23 |