Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5585629 | Electron beam nano-metrology system | Samuel K. Doran, William A. Enichen, Timothy R. Groves, Rodney A. Kendall, Richard D. Moore +2 more | 1996-12-17 |
| 5345816 | Integrated tip strain sensor for use in combination with a single axis atomic force microscope | Joachim Clabes, Laszlo Landstein | 1994-09-13 |
| 5321977 | Integrated tip strain sensor for use in combination with a single axis atomic force microscope | Joachim Clabes, Laszlo Landstein | 1994-06-21 |
| 5298975 | Combined scanning force microscope and optical metrology tool | Calvin K. Chi, Joachim Clabes, Philip Charles Danby Hobbs, Laszlo Landstein, Martin P. O'Boyle +2 more | 1994-03-29 |
| 4659220 | Optical inspection system for semiconductor wafers | Joseph J. Bronte, Roland Herbert | 1987-04-21 |
| 4600936 | Chip registration mechanism | Bruce E. Tompkins | 1986-07-15 |
| 4493745 | Optical emission spectroscopy end point detection in plasma etching | Lee Chen, Harlan Seymour | 1985-01-15 |