| 7391023 |
Lithography tool image quality evaluating and correcting |
Christopher F. Robinson |
2008-06-24 |
| 6931337 |
Lithography tool image quality evaluating and correcting |
Christopher F. Robinson |
2005-08-16 |
| 6388516 |
Precision high speed magnetic coil driver circuit |
Samuel K. Doran |
2002-05-14 |
| 6320187 |
Magnification and rotation calibration patterns for particle beam projection system |
— |
2001-11-20 |
| 6201251 |
Compensation of space charge in a particle beam system |
Steven D. Golladay |
2001-03-13 |
| 6040095 |
Measurement marks for e-beam projection mask and method of using |
Christophe F. Robinson |
2000-03-21 |
| 5838013 |
Method for monitoring resist charging in a charged particle system |
Rainer Butsch, Michael S. Gordon, John G. Hartley |
1998-11-17 |
| 5763894 |
Calibration patterns and techniques for charged particle projection lithography systems |
Christopher F. Robinson |
1998-06-09 |
| 5621216 |
Hardware/software implementation for multipass E-beam mask writing |
Eileen Veronica Clarke, John G. Hartley |
1997-04-15 |
| 5585629 |
Electron beam nano-metrology system |
Samuel K. Doran, Timothy R. Groves, Rodney A. Kendall, Henri A. Khoury, Richard D. Moore +2 more |
1996-12-17 |
| 5570405 |
Registration and alignment technique for X-ray mask fabrication |
Ken Chan, John G. Hartley, Maris A. Sturans |
1996-10-29 |
| 5552611 |
Pseudo-random registration masks for projection lithography tool |
— |
1996-09-03 |
| 5301124 |
Registration of patterns formed of multiple fields |
Ken Chan, Donald E. Davis, Cecil T. Ho, Edward V. Weber, Guenther O. Langner |
1994-04-05 |
