Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5793048 | Curvilinear variable axis lens correction with shifted dipoles | Paul F. Petric | 1998-08-11 |
| 5757010 | Curvilinear variable axis lens correction with centered dipoles | — | 1998-05-26 |
| 5708274 | Curvilinear variable axis lens correction with crossed coils | Werner Stickel | 1998-01-13 |
| 5481164 | Variable axis stigmator | Paul F. Petric | 1996-01-02 |
| 5389858 | Variable axis stigmator | Paul F. Petric | 1995-02-14 |
| 5301124 | Registration of patterns formed of multiple fields | Ken Chan, Donald E. Davis, William A. Enichen, Cecil T. Ho, Edward V. Weber | 1994-04-05 |
| 5285074 | Dynamic compensation of non-linear electron beam landing angle in variable axis lenses | Don F. Haire, Cecil T. Ho, Werner Stickel, Edward V. Weber | 1994-02-08 |
| 5136167 | Electron beam lens and deflection system for plural-level telecentric deflection | Paul F. Petric | 1992-08-04 |
| 4820927 | Electron beam source employing a photo-emitter cathode | Kenneth J. Harte | 1989-04-11 |
| 4683366 | All electrostatic electron optical sub-system for variable electron beam spot shaping and method of operation | Kenneth J. Harte | 1987-07-28 |
| 4675528 | Method for measurement of spotsize and edgewidth in electron beam lithography | Kenneth J. Harte, Michael Dalterio, Marvin Fishbein | 1987-06-23 |
| 4468565 | Automatic focus and deflection correction in E-beam system using optical target height measurements | William Blair, Samuel K. Doran | 1984-08-28 |
| 4415851 | System for contactless testing of multi-layer ceramics | Hans C. Pfeiffer | 1983-11-15 |
| 4376249 | Variable axis electron beam projection system | Hans C. Pfeiffer, Maris A. Sturans | 1983-03-08 |