| 5793048 |
Curvilinear variable axis lens correction with shifted dipoles |
Paul F. Petric |
1998-08-11 |
| 5757010 |
Curvilinear variable axis lens correction with centered dipoles |
— |
1998-05-26 |
| 5708274 |
Curvilinear variable axis lens correction with crossed coils |
Werner Stickel |
1998-01-13 |
| 5481164 |
Variable axis stigmator |
Paul F. Petric |
1996-01-02 |
| 5389858 |
Variable axis stigmator |
Paul F. Petric |
1995-02-14 |
| 5301124 |
Registration of patterns formed of multiple fields |
Ken Chan, Donald E. Davis, William A. Enichen, Cecil T. Ho, Edward V. Weber |
1994-04-05 |
| 5285074 |
Dynamic compensation of non-linear electron beam landing angle in variable axis lenses |
Don F. Haire, Cecil T. Ho, Werner Stickel, Edward V. Weber |
1994-02-08 |
| 5136167 |
Electron beam lens and deflection system for plural-level telecentric deflection |
Paul F. Petric |
1992-08-04 |
| 4820927 |
Electron beam source employing a photo-emitter cathode |
Kenneth J. Harte |
1989-04-11 |
| 4683366 |
All electrostatic electron optical sub-system for variable electron beam spot shaping and method of operation |
Kenneth J. Harte |
1987-07-28 |
| 4675528 |
Method for measurement of spotsize and edgewidth in electron beam lithography |
Kenneth J. Harte, Michael Dalterio, Marvin Fishbein |
1987-06-23 |
| 4468565 |
Automatic focus and deflection correction in E-beam system using optical target height measurements |
William Blair, Samuel K. Doran |
1984-08-28 |
| 4415851 |
System for contactless testing of multi-layer ceramics |
Hans C. Pfeiffer |
1983-11-15 |
| 4376249 |
Variable axis electron beam projection system |
Hans C. Pfeiffer, Maris A. Sturans |
1983-03-08 |
