Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6710361 | Multi-beam hybrid solenoid lens electron beam system | Michael S. Gordon, Maris A. Sturans | 2004-03-23 |
| 6633040 | Solenoid electron beam lenses with high demagnification and low aberrations | Maris A. Sturans | 2003-10-14 |
| 6296976 | Compensation of within-subfield linewidth variation in e-beam projection lithography | Timothy R. Groves, Steven D. Golladay | 2001-10-02 |
| 6180947 | Multi-element deflection aberration correction for electron beam lithography | Werner Stickel, Michael S. Gordon, Steven D. Golladay | 2001-01-30 |
| 6130432 | Particle beam system with dynamic focusing | Joseph J. Senesi, Maris A. Sturans | 2000-10-10 |
| 6069684 | Electron beam projection lithography system (EBPS) | Steven D. Golladay, Paul F. Petric, Werner Stickel | 2000-05-30 |
| 5935739 | Manufacturing method for membrane lithography mask with mask fields | Thomas Bayer, Johann Greschner, Samuel Kalt, Klaus Meissner | 1999-08-10 |
| 5674413 | Scattering reticle for electron beam systems | Werner Stickel | 1997-10-07 |
| 5633507 | Electron beam lithography system with low brightness | Werner Stickel | 1997-05-27 |
| 5545902 | Electron beam lithography system | Werner Stickel | 1996-08-13 |
| 5466904 | Electron beam lithography system | Werner Stickel | 1995-11-14 |
| 4945246 | Tri-deflection electron beam system | Donald E. Davis, Cecil T. Ho, Jon E. Lieberman, Maris A. Sturans | 1990-07-31 |
| 4859856 | Telecentric sub-field deflection with vail | Timothy R. Groves, Werner Stickel, Maris A. Sturans | 1989-08-22 |
| 4843330 | Electron beam contactless testing system with grid bias switching | Steven D. Golladay, Fritz J. Hohn | 1989-06-27 |
| 4818885 | Electron beam writing method and system using large range deflection in combination with a continuously moving table | Donald E. Davis, Samuel K. Doran, Merlyn H. Perkins | 1989-04-04 |
| 4544846 | Variable axis immersion lens electron beam projection system | Gunther O. Langner, Maris A. Sturans | 1985-10-01 |
| 4423305 | Method and apparatus for controlling alignment of an electron beam of a variable shape | — | 1983-12-27 |
| 4417203 | System for contactless electrical property testing of multi-layer ceramics | Robert A. Simpson, Werner Stickel | 1983-11-22 |
| 4415851 | System for contactless testing of multi-layer ceramics | Guenther O. Langner | 1983-11-15 |
| 4376249 | Variable axis electron beam projection system | Guenther O. Langner, Maris A. Sturans | 1983-03-08 |
| 4251728 | Compensated magnetic deflection coil for electron beam lithography system | Maris A. Sturans | 1981-02-17 |
| 4243866 | Method and apparatus for forming a variable size electron beam | Philip M. Ryan, Edward V. Weber | 1981-01-06 |
| 4213053 | Electron beam system with character projection capability | — | 1980-07-15 |