Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573514 | Method for aligning electron beam projection lithography tool | Michael S. Gordon, Christopher F. Robinson | 2003-06-03 |
| 5909658 | High speed electron beam lithography pattern processing system | Eileen Veronica Clarke, John Kay, Christine Ann Kostek, Daniel Pierce, Robert Joseph Quickle +1 more | 1999-06-01 |
| 4945246 | Tri-deflection electron beam system | Donald E. Davis, Cecil T. Ho, Hans C. Pfeiffer, Maris A. Sturans | 1990-07-31 |