Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039813 | Charged particle-optical systems, methods and components | Antonio Casares, Thomas Kemen, Rainer Knippelmeyer, Thomas Bayer, Georg Fritz +1 more | 2011-10-18 |
| 6004700 | Membrane mask for electron beam lithography | Johann Greschner, Klaus Meissner, Rudolf Paul | 1999-12-21 |
| 5935739 | Manufacturing method for membrane lithography mask with mask fields | Thomas Bayer, Johann Greschner, Klaus Meissner, Hans C. Pfeiffer | 1999-08-10 |