Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8658937 | Method and apparatus for processing substrate edges | Ronald P. Millman, Jr., Victoria M. Chaplick, David J. Elliott, Eugene O. Degenkolb, Murray Tardif | 2014-02-25 |
| 8415587 | Fiber-optic beam delivery system for wafer edge processing | Ronald P. Millman, Jr., Victoria M. Chaplick, David J. Elliott | 2013-04-09 |
| 8410394 | Method and apparatus for processing substrate edges | Ronald P. Millman, Jr., Victoria M. Chaplick, David J. Elliott, Murray Tardif, Eugene O. Degenkolb | 2013-04-02 |
| 8183500 | Orthogonal beam delivery system for wafer edge processing | Ronald P. Millman, Jr., Victoria M. Chaplick | 2012-05-22 |
| 7270724 | Scanning plasma reactor | David J. Elliott, Larry E. Shephard | 2007-09-18 |
| 7109505 | Shaped biocompatible radiation shield and method for making same | Alan P. Sliski | 2006-09-19 |
| 6421416 | Apparatus for local radiation therapy | Alan P. Sliski | 2002-07-16 |
| 6302581 | Support system for a radiation treatment apparatus | Alan P. Sliski | 2001-10-16 |
| 6301328 | Apparatus for local radiation therapy | Alan P. Sliski | 2001-10-09 |
| 6285735 | Apparatus for local radiation therapy | Alan P. Sliski | 2001-09-04 |
| 5621780 | X-ray apparatus for applying a predetermined flux to an interior surface of a body cavity | Donald O. Smith, Alan P. Sliski | 1997-04-15 |
| 5566221 | Apparatus for applying a predetermined x-radiation flux to an interior surface of a body cavity | Donald O. Smith, Alan P. Sliski, Robert A. Roth | 1996-10-15 |
| 5548444 | Optical beam homogenizing apparatus and method | Joseph L. McLaughlin, Mark R. Fernald | 1996-08-20 |
| 5452720 | Method for treating brain tumors | Donald O. Smith, Alan P. Sliski, Peter J. Biggs, John F. Beatty | 1995-09-26 |
| 5428658 | X-ray source with flexible probe | Peter E. Oettinger | 1995-06-27 |
| 5422926 | X-ray source with shaped radiation pattern | Donald O. Smith, Alan P. Sliski, Mark Dinsmore | 1995-06-06 |
| 5039862 | Switched electron beam source employing a common photo-emitter cathode and method of operation | Donald O. Smith | 1991-08-13 |
| 4820927 | Electron beam source employing a photo-emitter cathode | Guenther O. Langner | 1989-04-11 |
| 4728799 | Height measurement and correction method for electron beam lithography system | James Gordon, Vijay K. Singhal | 1988-03-01 |
| 4694178 | Multiple channel electron beam optical column lithography system and method of operation | — | 1987-09-15 |
| 4683366 | All electrostatic electron optical sub-system for variable electron beam spot shaping and method of operation | Guenther O. Langner | 1987-07-28 |
| 4675528 | Method for measurement of spotsize and edgewidth in electron beam lithography | Guenther O. Langner, Michael Dalterio, Marvin Fishbein | 1987-06-23 |
| 4661741 | Miniature electron gun with focusing grid structure | John Valun | 1987-04-28 |
| 4661709 | Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture | David M. Walker, Alan P. Sliski, John J. Carrona | 1987-04-28 |
| 4467211 | Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system | Donald O. Smith | 1984-08-21 |