Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4430571 | Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system | Donald O. Smith | 1984-02-07 |
| 4390789 | Electron beam array lithography system employing multiple parallel array optics channels and method of operation | Donald O. Smith | 1983-06-28 |
| 4342949 | Charged particle beam structure having electrostatic coarse and fine double deflection system with dynamic focus and diverging beam | Edward C. Dougherty | 1982-08-03 |
| 4338548 | Unipotential lens assembly for charged particle beam tubes and method for applying correction potentials thereto | David Bono, Marvin Fishbein | 1982-07-06 |