Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5635709 | Method and apparatus for measuring radiation dose distribution | Alan P. Sliski, Donald O. Smith | 1997-06-03 |
| 4675528 | Method for measurement of spotsize and edgewidth in electron beam lithography | Guenther O. Langner, Kenneth J. Harte, Marvin Fishbein | 1987-06-23 |