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Vijay K. Singhal

CD Control Data: 1 patents #56 of 192Top 30%
Overall (All Time): #3,947,651 of 4,157,543Top 95%
1
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Issued Patents All Time

Patent #TitleCo-InventorsDate
4728799 Height measurement and correction method for electron beam lithography system James Gordon, Kenneth J. Harte 1988-03-01