Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916716 | Emulation methodology for critical dimension control in E-Beam lithography | Timothy R. Groves, John G. Hartley | 1999-06-29 |
| 5838013 | Method for monitoring resist charging in a charged particle system | William A. Enichen, Michael S. Gordon, John G. Hartley | 1998-11-17 |
| 5798528 | Correction of pattern dependent position errors in electron beam lithography | John G. Hartley, Werner Stickel | 1998-08-25 |