RB

Rainer Butsch

IBM: 3 patents #26,272 of 70,183Top 40%
Overall (All Time): #1,634,157 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5916716 Emulation methodology for critical dimension control in E-Beam lithography Timothy R. Groves, John G. Hartley 1999-06-29
5838013 Method for monitoring resist charging in a charged particle system William A. Enichen, Michael S. Gordon, John G. Hartley 1998-11-17
5798528 Correction of pattern dependent position errors in electron beam lithography John G. Hartley, Werner Stickel 1998-08-25