Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4534816 | Single wafer plasma etch reactor | Lee Chen, Charles J. Hendricks, Gangadhara S. Mathad | 1985-08-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4534816 | Single wafer plasma etch reactor | Lee Chen, Charles J. Hendricks, Gangadhara S. Mathad | 1985-08-13 |