Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4617086 | Rapid etching method for silicon by SF.sub.6 gas | Frances Anne Houle, Kurt E. Petersen | 1986-10-14 |
| 4490210 | Laser induced dry chemical etching of metals | Lee Chen, Gangadhara S. Mathad | 1984-12-25 |
| 4478677 | Laser induced dry etching of vias in glass with non-contact masking | Lee Chen, Gangadhara S. Mathad | 1984-10-23 |
| 4331504 | Etching process with vibrationally excited SF.sub.6 | John W. Coburn, Eric Kay | 1982-05-25 |