Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7148073 | Methods and systems for preparing a copper containing substrate for analysis | David Aitan Soltz, Mehran Nasser-Ghodsi, Harold F. Winters, Alexander Jozef Gubbens, Gabor Toth | 2006-12-12 |
| 6475920 | Plasma etching method using low ionization potential gas | Kevin G. Donohoe | 2002-11-05 |
| 6228775 | Plasma etching method using low ionization potential gas | Kevin G. Donohoe | 2001-05-08 |
| 4331504 | Etching process with vibrationally excited SF.sub.6 | Tung J. Chuang, Eric Kay | 1982-05-25 |
| 4226896 | Plasma method for forming a metal containing polymer | Eric Kay | 1980-10-07 |