Issued Patents All Time
Showing 76–88 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5507499 | Method of sealing useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential | Robert E. Davenport | 1996-04-16 |
| 5484011 | Method of heating and cooling a wafer during semiconductor processing | Howard Grunes, Dana L. Andrews | 1996-01-16 |
| 5447409 | Robot assembly | Howard Grunes, Robert B. Lowrance | 1995-09-05 |
| 5401319 | Lid and door for a vacuum chamber and pretreatment therefor | Thomas Banholzer, Dan Marohl, Donald M. Mintz | 1995-03-28 |
| 5380414 | Shield and collimator pasting deposition chamber with a wafer support periodically used as an acceptor | — | 1995-01-10 |
| 5366002 | Apparatus and method to ensure heat transfer to and from an entire substrate during semiconductor processing | — | 1994-11-22 |
| 5362372 | Self cleaning collimator | — | 1994-11-08 |
| 5320728 | Planar magnetron sputtering source producing improved coating thickness uniformity, step coverage and step coverage uniformity | — | 1994-06-14 |
| 5228501 | Physical vapor deposition clamping mechanism and heater/cooler | Howard Grunes, Dana L. Andrews | 1993-07-20 |
| 5226632 | Slit valve apparatus and method | Dana L. Andrews | 1993-07-13 |
| 5223112 | Removable shutter apparatus for a semiconductor process chamber | — | 1993-06-29 |
| 5186718 | Staged-vacuum wafer processing system and method | Howard Grunes, Sasson Somekh, Dan Maydan | 1993-02-16 |
| 5171412 | Material deposition method for integrated circuit manufacturing | Homoyoun Talieh, Hoa Kieu, Chien Rhone Wang | 1992-12-15 |