Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6296743 | Apparatus for DC reactive plasma vapor deposition of an electrically insulating material using a shielded secondary anode | — | 2001-10-02 |
| 5171412 | Material deposition method for integrated circuit manufacturing | Avi Tepman, Hoa Kieu, Chien Rhone Wang | 1992-12-15 |