Issued Patents All Time
Showing 26–50 of 101 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7065737 | Multi-layer overlay measurement and correction technique for IC manufacturing | Bharath Rangarajan, Bhanwar Singh | 2006-06-20 |
| 7064846 | Non-lithographic shrink techniques for improving line edge roughness and using imperfect (but simpler) BARCs | Gilles Amblard, Bhanwar Singh, Ramkumar Subramanian | 2006-06-20 |
| 7056646 | Use of base developers as immersion lithography fluid | Gilles Amblard, Bhanwar Singh | 2006-06-06 |
| 7034930 | System and method for defect identification and location using an optical indicia device | Ramkumar Subramanian, Bharath Rangarajan | 2006-04-25 |
| 7001830 | System and method of pattern recognition and metrology structure for an X-initiative layout design | Bharath Rangarajan, Bhanwar Singh | 2006-02-21 |
| 6999254 | Refractive index system monitor and control for immersion lithography | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2006-02-14 |
| 6972201 | Using scatterometry to detect and control undercut for ARC with developable BARCs | Ramkumar Subramanian, Bhanwar Singh | 2005-12-06 |
| 6972576 | Electrical critical dimension measurement and defect detection for reticle fabrication | Christopher F. Lyons, Cyrus E. Tabery, Bhanwar Singh | 2005-12-06 |
| 6954678 | Artificial intelligence system for track defect problem solving | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2005-10-11 |
| 6924157 | Real time particle monitor inside of plasma chamber during resist strip processing | Bhanwar Singh, Bharath Rangarajan | 2005-08-02 |
| 6915177 | Comprehensive integrated lithographic process control system based on product design and yield feedback system | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2005-07-05 |
| 6844206 | Refractive index system monitor and control for immersion lithography | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2005-01-18 |
| 6818360 | Quartz mask crack monitor system for reticle by acoustic and/or laser scatterometry | Bhanwar Singh, Bharath Rangarajan | 2004-11-16 |
| 6808591 | Model based metal overetch control | Bharath Rangarajan, Christopher F. Lyons, Steven C. Avanzino, Ramkumar Subramanian, Bhanwar Singh +1 more | 2004-10-26 |
| 6809793 | System and method to monitor reticle heating | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan | 2004-10-26 |
| 6784446 | Reticle defect printability verification by resist latent image comparison | Bhanwar Singh, Bharath Rangarajan | 2004-08-31 |
| 6771356 | Scatterometry of grating structures to monitor wafer stress | Christopher F. Lyons, Bhanwar Singh, Steven C. Avanzino, Bharath Rangarajan, Ramkumar Subramanian +1 more | 2004-08-03 |
| 6762133 | System and method for control of hardmask etch to prevent pattern collapse of ultra-thin resists | Bharath Rangarajan, Ramkumar Subramanian | 2004-07-13 |
| 6759179 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio, Wolfram Grundke +3 more | 2004-07-06 |
| 6753261 | In-situ chemical composition monitor on wafer during plasma etching for defect control | Arvind Halliyal, Bhanwar Singh | 2004-06-22 |
| 6741445 | Method and system to monitor and control electro-static discharge | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2004-05-25 |
| 6724476 | Low defect metrology approach on clean track using integrated metrology | Bhanwar Singh, Bharath Rangarajan | 2004-04-20 |
| 6684172 | Sensor to predict void free films using various grating structures and characterize fill performance | Ramkumar Subramanian, Steven C. Avanzino, Christopher F. Lyons, Bharath Rangarajan, Bhanwar Singh +1 more | 2004-01-27 |
| 6663723 | Vapor drying for cleaning photoresists | Michael K. Templeton, Ramkumar Subramanian, Bharath Rangarajan | 2003-12-16 |
| 6665065 | Defect detection in pellicized reticles via exposure at short wavelengths | Bhanwar Singh, Wolfram Porsche | 2003-12-16 |