Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376389 | Method for eliminating anti-reflective coating in semiconductors | Ramkumar Subramanian, Minh Van Ngo, YongZhong Hu, Hiroyuki Kinoshita, Fei Wang +1 more | 2002-04-23 |
| 6359307 | Method for forming self-aligned contacts and interconnection lines using dual damascene techniques | Fei Wang, Hiroyuki Kinoshita, Yu Sun, Wenge Yang | 2002-03-19 |
| 6348406 | Method for using a low dielectric constant layer as a semiconductor anti-reflective coating | Ramkumar Subramanian, Minh Van Ngo, YongZhong Hu, Hiroyuki Kinoshita, Fei Wang +1 more | 2002-02-19 |
| 6294460 | Semiconductor manufacturing method using a high extinction coefficient dielectric photomask | Ramkumar Subramanian, Minh Van Ngo, Suzette K. Pangrle | 2001-09-25 |
| 6291296 | Method for removing anti-reflective coating layer using plasma etch process before contact CMP | Angela T. Hui, Wenge Yang, Mark T. Ramsbey, Suzette K. Pangrle, Minh Van Ngo | 2001-09-18 |
| 6217418 | Polishing pad and method for polishing porous materials | Todd P. Lukanc | 2001-04-17 |
| 6184141 | Method for multiple phase polishing of a conductive layer in a semidonductor wafer | Steven C. Avanzino, Gerd Marxsen | 2001-02-06 |
| 6136649 | Method for removing anti-reflective coating layer using plasma etch process after contact CMP | Angela T. Hui, Wenge Yang, Mark T. Ramsbey, Suzette K. Pangrle, Minh Van Ngo | 2000-10-24 |
| 6133619 | Reduction of silicon oxynitride film delamination in integrated circuit inter-level dielectrics | Richard J. Huang, David Matsumoto, Mark T. Ramsbey, Yu Sun, Judith Quan Rizzuto | 2000-10-17 |
| 6124640 | Scalable and reliable integrated circuit inter-level dielectric | Richard J. Huang, Hung-Sheng Chen, Yu Sun | 2000-09-26 |
| 6004862 | Core array and periphery isolation technique | Unsoon Kim, Hung-Sheng Chen, Yu Sun | 1999-12-21 |
| 5998301 | Method and system for providing tapered shallow trench isolation structure profile | Tuan Pham, Angela T. Hui | 1999-12-07 |
| 5923993 | Method for fabricating dishing free shallow isolation trenches | — | 1999-07-13 |
| 5840623 | Efficient and economical method of planarization of multilevel metallization structures in integrated circuits using CMP | — | 1998-11-24 |
| 5665199 | Methodology for developing product-specific interlayer dielectric polish processes | Steven C. Avanzino | 1997-09-09 |
| 5665201 | High removal rate chemical-mechanical polishing | — | 1997-09-09 |
| 4992134 | Dopant-independent polysilicon plasma etch | Subhash Gupta | 1991-02-12 |