Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972440 | Monitoring and control of a fabrication process | Erik Cho Houge, Robert Jones | 2011-07-05 |
| D536522 | Wrist/hand worn mirror | — | 2007-02-13 |
| 6985229 | Overlay metrology using scatterometry profiling | Cynthia C. Lee, Stephen Arlon Meisner, Thomas Wolf, Alberto Santoni | 2006-01-10 |
| 6893800 | Substrate topography compensation at mask design: 3D OPC topography anchored | Scott Jessen, Scott M. Nagel | 2005-05-17 |
| 6750447 | Calibration standard for high resolution electron microscopy | Erik Cho Houge, Catherine Vartuli, Fred Stevie | 2004-06-15 |
| 6727720 | Probe having a microstylet | Erik Cho Houge, Ryan Maynard, Larry E. Plew, Jeffrey B. Bindell | 2004-04-27 |
| 6714892 | Three dimensional reconstruction metrology | Erik Cho Houge, Larry E. Plew | 2004-03-30 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, Scott Jessen, Catherine Vartuli, Fred Stevie | 2004-03-23 |
| 6651226 | Process control using three dimensional reconstruction metrology | Erik Cho Houge, Larry E. Plew | 2003-11-18 |
| 6641746 | Control of semiconductor processing | Erik Cho Houge, Edward Alios Rietman | 2003-11-04 |
| 6633032 | Mass spectrometer particle counter | Erik Cho Houge, Fred Stevie, Steven Barry Valle, Catherine Vartuli | 2003-10-14 |
| 6627885 | Method of focused ion beam pattern transfer using a smart dynamic template | Erik Cho Houge, Fred Stevie, Catherine Vartuli, Scott Jessen | 2003-09-30 |
| 6606371 | X-ray system | Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Catherine Vartuli | 2003-08-12 |
| 6577970 | Method of determining a crystallographic quality of a material located on a substrate | Erik Cho Houge, Larry E. Plew, Fred Stevie, Catherine Vartuli | 2003-06-10 |
| 6569690 | Monitoring system for determining progress in a fabrication activity | Erik Cho Houge, Isik C. Kizilyalli, Fred Stevie, Catherine Vartuli | 2003-05-27 |
| 6556703 | Scanning electron microscope system and method of manufacturing an integrated circuit | Brittin Kane | 2003-04-29 |
| 6369891 | Method of determining accuracy error in line width metrology device | Brittin Kane | 2002-04-09 |
| 6326618 | Method of analyzing semiconductor surface with patterned feature using line width metrology | Brittin Kane | 2001-12-04 |
| 6265235 | Method of sectioning of photoresist for shape evaluation | Erik Cho Houge, Brittin Kane, Simon John Molloy, Catherine Vartuli | 2001-07-24 |
| 6258610 | Method analyzing a semiconductor surface using line width metrology with auto-correlation operation | James Walter Blatchford, Scott Jessen, Brittin Kane, Nace Layadi, Simon John Molloy | 2001-07-10 |
| 6225639 | Method of monitoring a patterned transfer process using line width metrology | Thomas E. Adams, Thomas S. Frederick, Scott Jessen, Catherine Vartuli | 2001-05-01 |
| 6097484 | Location of defects using dye penetration | Brittin Kane, Annette M. Crevasse, Todd Henry | 2000-08-01 |