Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6985229 | Overlay metrology using scatterometry profiling | Cynthia C. Lee, Stephen Arlon Meisner, Thomas Wolf, John M. McIntosh | 2006-01-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6985229 | Overlay metrology using scatterometry profiling | Cynthia C. Lee, Stephen Arlon Meisner, Thomas Wolf, John M. McIntosh | 2006-01-10 |