Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7342225 | Crystallographic metrology and process control | Erik Cho Houge, Brian Kempshall, Stephen M. Schwarz | 2008-03-11 |
| 7009487 | Fabrication of nano-scale temperature sensors and heaters | Lee M. Chow, Dan Zhou | 2006-03-07 |
| 6905736 | Fabrication of nano-scale temperature sensors and heaters | Lee M. Chow, Dan Zhou | 2005-06-14 |
| 6750447 | Calibration standard for high resolution electron microscopy | Erik Cho Houge, Catherine Vartuli, John M. McIntosh | 2004-06-15 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, Scott Jessen, John M. McIntosh, Catherine Vartuli | 2004-03-23 |
| 6633032 | Mass spectrometer particle counter | Erik Cho Houge, John M. McIntosh, Steven Barry Valle, Catherine Vartuli | 2003-10-14 |
| 6627885 | Method of focused ion beam pattern transfer using a smart dynamic template | John M. McIntosh, Erik Cho Houge, Catherine Vartuli, Scott Jessen | 2003-09-30 |
| 6577970 | Method of determining a crystallographic quality of a material located on a substrate | Erik Cho Houge, John M. McIntosh, Larry E. Plew, Catherine Vartuli | 2003-06-10 |
| 6569690 | Monitoring system for determining progress in a fabrication activity | Erik Cho Houge, Isik C. Kizilyalli, John M. McIntosh, Catherine Vartuli | 2003-05-27 |
| 6405584 | Probe for scanning probe microscopy and related methods | Jeffrey B. Bindell, Erik Cho Houge, Larry E. Plew, Terri Lynn Shofner | 2002-06-18 |
| 5804460 | Linewidth metrology of integrated circuit structures | Jeffrey B. Bindell, Dennis Earl Schrope, Richard J. Dare, Larry E. Plew | 1998-09-08 |
| 4861126 | Low temperature intrinsic gettering technique | Mindaugas F. Dautartas, Alain Harrus, Edward P. Martin, Jr. | 1989-08-29 |