| 7342225 |
Crystallographic metrology and process control |
Erik Cho Houge, Brian Kempshall, Stephen M. Schwarz |
2008-03-11 |
| 7009487 |
Fabrication of nano-scale temperature sensors and heaters |
Lee M. Chow, Dan Zhou |
2006-03-07 |
| 6905736 |
Fabrication of nano-scale temperature sensors and heaters |
Lee M. Chow, Dan Zhou |
2005-06-14 |
| 6750447 |
Calibration standard for high resolution electron microscopy |
Erik Cho Houge, Catherine Vartuli, John M. McIntosh |
2004-06-15 |
| 6708574 |
Abnormal photoresist line/space profile detection through signal processing of metrology waveform |
Erik Cho Houge, Scott Jessen, John M. McIntosh, Catherine Vartuli |
2004-03-23 |
| 6633032 |
Mass spectrometer particle counter |
Erik Cho Houge, John M. McIntosh, Steven Barry Valle, Catherine Vartuli |
2003-10-14 |
| 6627885 |
Method of focused ion beam pattern transfer using a smart dynamic template |
John M. McIntosh, Erik Cho Houge, Catherine Vartuli, Scott Jessen |
2003-09-30 |
| 6577970 |
Method of determining a crystallographic quality of a material located on a substrate |
Erik Cho Houge, John M. McIntosh, Larry E. Plew, Catherine Vartuli |
2003-06-10 |
| 6569690 |
Monitoring system for determining progress in a fabrication activity |
Erik Cho Houge, Isik C. Kizilyalli, John M. McIntosh, Catherine Vartuli |
2003-05-27 |
| 6405584 |
Probe for scanning probe microscopy and related methods |
Jeffrey B. Bindell, Erik Cho Houge, Larry E. Plew, Terri Lynn Shofner |
2002-06-18 |
| 5804460 |
Linewidth metrology of integrated circuit structures |
Jeffrey B. Bindell, Dennis Earl Schrope, Richard J. Dare, Larry E. Plew |
1998-09-08 |
| 4861126 |
Low temperature intrinsic gettering technique |
Mindaugas F. Dautartas, Alain Harrus, Edward P. Martin, Jr. |
1989-08-29 |