Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8853805 | Strain measurement test module | Jayhoon CHUNG, Guoda Lian | 2014-10-07 |
| 6870950 | Method for detecting defects in a material and a system for accomplishing the same | Erik Cho Houge, Mike Antonell, Pam Cavanagh, Hui Ma | 2005-03-22 |
| 6750447 | Calibration standard for high resolution electron microscopy | Erik Cho Houge, John M. McIntosh, Fred Stevie | 2004-06-15 |
| 6713409 | Semiconductor manufacturing using modular substrates | Michael J. Antonell, Erik Cho Houge, Nitin M. Patel, Larry E. Plew | 2004-03-30 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, Scott Jessen, John M. McIntosh, Fred Stevie | 2004-03-23 |
| 6695572 | Method and apparatus for minimizing semiconductor wafer contamination | Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Jennifer Juszczak | 2004-02-24 |
| 6633032 | Mass spectrometer particle counter | Erik Cho Houge, John M. McIntosh, Fred Stevie, Steven Barry Valle | 2003-10-14 |
| 6627885 | Method of focused ion beam pattern transfer using a smart dynamic template | John M. McIntosh, Erik Cho Houge, Fred Stevie, Scott Jessen | 2003-09-30 |
| 6606371 | X-ray system | Michael J. Antonell, Erik Cho Houge, John M. McIntosh, Larry E. Plew | 2003-08-12 |
| 6603119 | Calibration method for quantitative elemental analysis | Lucille A. Giannuzzi, Frederick A. Stevie | 2003-08-05 |
| 6577970 | Method of determining a crystallographic quality of a material located on a substrate | Erik Cho Houge, John M. McIntosh, Larry E. Plew, Fred Stevie | 2003-06-10 |
| 6569690 | Monitoring system for determining progress in a fabrication activity | Erik Cho Houge, Isik C. Kizilyalli, John M. McIntosh, Fred Stevie | 2003-05-27 |
| 6534851 | Modular semiconductor substrates | Michael J. Antonell, Erik Cho Houge, Nitin M. Patel, Larry E. Plew | 2003-03-18 |
| 6519543 | Calibration method for quantitative elemental analysis | Lucille A. Giannuzzi, Frederick A. Stevie | 2003-02-11 |
| 6362475 | Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby | Jeffrey B. Bindell, Frederick A. Stevie | 2002-03-26 |
| 6265235 | Method of sectioning of photoresist for shape evaluation | John M. McIntosh, Erik Cho Houge, Brittin Kane, Simon John Molloy | 2001-07-24 |
| 6246060 | Apparatus for holding and aligning a scanning electron microscope sample | Michael Ackeret, Jeffry B. Bindell, Charles E. Bryson, III, Larry E. Plew, Xiao Z. Wu | 2001-06-12 |
| 6225639 | Method of monitoring a patterned transfer process using line width metrology | Thomas E. Adams, Thomas S. Frederick, Scott Jessen, John M. McIntosh | 2001-05-01 |