| 8853805 |
Strain measurement test module |
Jayhoon CHUNG, Guoda Lian |
2014-10-07 |
| 6870950 |
Method for detecting defects in a material and a system for accomplishing the same |
Erik Cho Houge, Mike Antonell, Pam Cavanagh, Hui Ma |
2005-03-22 |
| 6750447 |
Calibration standard for high resolution electron microscopy |
Erik Cho Houge, John M. McIntosh, Fred Stevie |
2004-06-15 |
| 6713409 |
Semiconductor manufacturing using modular substrates |
Michael J. Antonell, Erik Cho Houge, Nitin M. Patel, Larry E. Plew |
2004-03-30 |
| 6708574 |
Abnormal photoresist line/space profile detection through signal processing of metrology waveform |
Erik Cho Houge, Scott Jessen, John M. McIntosh, Fred Stevie |
2004-03-23 |
| 6695572 |
Method and apparatus for minimizing semiconductor wafer contamination |
Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Jennifer Juszczak |
2004-02-24 |
| 6633032 |
Mass spectrometer particle counter |
Erik Cho Houge, John M. McIntosh, Fred Stevie, Steven Barry Valle |
2003-10-14 |
| 6627885 |
Method of focused ion beam pattern transfer using a smart dynamic template |
John M. McIntosh, Erik Cho Houge, Fred Stevie, Scott Jessen |
2003-09-30 |
| 6606371 |
X-ray system |
Michael J. Antonell, Erik Cho Houge, John M. McIntosh, Larry E. Plew |
2003-08-12 |
| 6603119 |
Calibration method for quantitative elemental analysis |
Lucille A. Giannuzzi, Frederick A. Stevie |
2003-08-05 |
| 6577970 |
Method of determining a crystallographic quality of a material located on a substrate |
Erik Cho Houge, John M. McIntosh, Larry E. Plew, Fred Stevie |
2003-06-10 |
| 6569690 |
Monitoring system for determining progress in a fabrication activity |
Erik Cho Houge, Isik C. Kizilyalli, John M. McIntosh, Fred Stevie |
2003-05-27 |
| 6534851 |
Modular semiconductor substrates |
Michael J. Antonell, Erik Cho Houge, Nitin M. Patel, Larry E. Plew |
2003-03-18 |
| 6519543 |
Calibration method for quantitative elemental analysis |
Lucille A. Giannuzzi, Frederick A. Stevie |
2003-02-11 |
| 6362475 |
Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby |
Jeffrey B. Bindell, Frederick A. Stevie |
2002-03-26 |
| 6265235 |
Method of sectioning of photoresist for shape evaluation |
John M. McIntosh, Erik Cho Houge, Brittin Kane, Simon John Molloy |
2001-07-24 |
| 6246060 |
Apparatus for holding and aligning a scanning electron microscope sample |
Michael Ackeret, Jeffry B. Bindell, Charles E. Bryson, III, Larry E. Plew, Xiao Z. Wu |
2001-06-12 |
| 6225639 |
Method of monitoring a patterned transfer process using line width metrology |
Thomas E. Adams, Thomas S. Frederick, Scott Jessen, John M. McIntosh |
2001-05-01 |