Issued Patents 2025
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422755 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Sheng-Kang Yu, Li-Jui Chen, Heng-Hsin Liu | 2025-09-23 |
| 12405541 | Methods of servicing photolithographic apparatus | Yu-Huan Chen, Cheng-Hsuan Wu, Ming-Hsun Tsai, Li-Jui Chen | 2025-09-02 |
| 12405529 | Lithography system and methods | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-09-02 |
| 12372887 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Sheng-Kang Yu, Li-Jui Chen +1 more | 2025-07-29 |
| 12372886 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Sheng-Kang Yu, Kai Tak Lam, Sagar Deepak Khivsara | 2025-07-29 |
| 12372878 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-07-29 |
| 12372880 | System and method for detecting debris in a photolithography system | Tzu-Jung Pan, Wei-Shin Cheng, Cheng-Hung Tsai, Li-Jui Chen, Heng-Hsin Liu | 2025-07-29 |
| 12360458 | Radiation collector | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-07-15 |
| 12353142 | Semiconductor processing tool and methods of operation | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-07-08 |
| 12316828 | Automatic time delay and integration (TDI) mask inspection system calibration | Pei Zhu, Yen-Hsun Chen | 2025-05-27 |
| 12287572 | Lithography system and methods | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-04-29 |
| 12282262 | Method for controlling extreme ultraviolet light | Ssu-Yu Chen, Li-Jui Chen | 2025-04-22 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2025-02-25 |
| 12235593 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Sheng-Kang Yu, Li-Jui Chen, Heng-Hsin Liu | 2025-02-25 |
| 12228863 | EUV light source contamination monitoring system | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-02-18 |
| 12216413 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen | 2025-02-04 |
| 12210295 | Reticle cleaning device and method of use | Che-Chang Hsu, Sheng-Kang Yu, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12207381 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Ssu-Yu Chen, Li-Jui Chen | 2025-01-21 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Sheng-Kang Yu, Li-Jui Chen, Heng-Hsin Liu | 2025-01-07 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Bo-Tsun Liu, Li-Jui Chen +1 more | 2025-01-07 |