Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354867 | Particle removal apparatus | Siao-Chian Huang, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2025-07-08 |
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Bo-Tsun Liu +2 more | 2025-07-01 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12189311 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Li-Jui Chen | 2025-01-07 |