Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379675 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2025-08-05 |
| 12354867 | Particle removal apparatus | Siao-Chian Huang, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2025-07-08 |
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2025-07-01 |
| 12302484 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Bo-Tsun Liu, Li-Jui Chen | 2025-05-13 |
| 12292687 | Width adjustment of EUV radiation beam | Chi-Ming Yang, Tsung-Hsun Lee, Jian-Yuan Su, Ching-Juinn Huang | 2025-05-06 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2025-02-25 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2025-01-07 |