Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379675 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Chi-Ming Yang | 2025-08-05 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Yen-Shuo Su, Chun-Lin Chang, Kai-Fa Ho, Li-Jui Chen +1 more | 2025-04-01 |
| 12210295 | Reticle cleaning device and method of use | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-01-07 |