Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen | 2025-06-17 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Che-Chang Hsu, Chun-Lin Chang, Kai-Fa Ho, Li-Jui Chen +1 more | 2025-04-01 |